Semiconductor force sensor

ABSTRACT

A semiconductor force sensor capable of preventing a diaphragm part ( 37 ) from being broken and accurately measuring a force applied thereto in a direction orthogonal to the diaphragm part ( 37 ), wherein a force transmitting means for applying a measured force to the diaphragm part ( 37 ) of a semiconductor force sensor element ( 31 ) is formed of a sphere ( 33 ) having a rigidity, and a through hole ( 63 ) passing through an opposed wall part ( 55 ) toward the diaphragm ( 37 ) is formed in the opposed wall parts ( 55 ) at a position opposed to the center part of the diaphragm part ( 37 ) so that a part of the sphere ( 33 ) can face the outside of the opposed wall part ( 55 ) and stores a part of the remaining part of the sphere ( 33 ) to allow the sphere ( 33 ) to be moved only in a direction orthogonal to the diaphragm part ( 37 ) and rotated on the center part of the diaphragm part ( 37 ).

TECHNICAL FIELD

The present invention relates to a semiconductor force sensor fordetecting a force such as a pressure or the like by a semiconductorforce sensor element, for output as an electric signal.

BACKGROUND ART

Japanese Patent Application Laid-Open Publication No. 118935/1993discloses a semiconductor force sensor including a semiconductor forcesensor element having a diaphragm section and a sphere for transmittinga force to the diaphragm section. The semiconductor force sensor warpsthe diaphragm section by the force applied to the sphere and converts achange in this force to an electric signal, thereby measuring the forceapplied to the sphere or turning on or off a switch. In thesemiconductor force sensor, a recess section, in which the sphere isplaced, is formed in the central portion of the semiconductor forcesensor element, and a through hole, into which the sphere to fitted, isformed in the opposed wall section of an receiving case facing therecess section so that part of the sphere faces outside. With thisstructure, positioning of the sphere is achieved by the through hole inthe opposed wall section with the sphere being secured in thesemiconductor force sensor element.

In such a semiconductor force sensor, however, when a force in adirection other than a direction orthogonal to the diaphragm section istransmitted to the diaphragm section through the sphere, an undue forceis applied to the diaphragm section, so that the diaphragm section mightbe broken. Further, a force applied to the direction orthogonal to thediaphragm section could not be measured accurately.

Japanese Utility Model Application No. 38779/1987 (Japanese UtilityModel Application Laid-Open publication No. 146734/1988) relating to amicrofilm discloses a pressure-sensitive sensor including a sensorelement constituted by a thin plate fixed to a receiving case and acomposite piezoelectric sheet having electrodes, and a sphere fortransmitting a force to the thin plate. The pressure-sensitive sensorapplies the force on the sphere to the composite piezoelectric sheetthrough the thin plate, converts a change in this force to an electricsignal, and measures a pressure applied to the sphere. In thispressure-sensitive sensor, a through hole into which the sphere isfitted is formed in the opposed wall section of the receiving casefacing the thin plate so that part of the sphere faces outside. Withthis structure, positioning of the sphere is achieved by the throughhole in the opposed wall section with the sphere being in contact withthe thin plate.

However, the sensor element in this pressure-sensitive sensor isenergized against the sphere through the thin plate by a spring. Thus,the sphere is strongly abutted onto the edge of the through hole in thereceiving case. For this reason, when a force in a direction other thanthe direction orthogonal to the thin plate is transmitted to the thinplate through the sphere, most of the force (force including even theforce in the direction other than the direction orthogonal to the thinplate) is measured. Then, there was a problem that the force applied tothe direction orthogonal to the thin plate could not be accuratelymeasured.

An object of the present invention is to provide a semiconductor forcesensor that can prevent an undue force from being applied to a diaphragmsection therein, and thus can prevent the diaphragm section beingbroken.

Another object of the present invention is to provide a semiconductorforce sensor that can accurately measure a force applied to a directionorthogonal to the diaphragm section.

DISCLOSURE OF THE INVENTION

A semiconductor force sensor of which the present invention aims atimprovement includes a semiconductor force sensor element having adiaphragm section provided with a converting section for converting achange in a force to a change in an electric signal by piezoresistiveeffect, force transmitting means for applying the force to be measuredto the diaphragm section of the semiconductor force sensor element, anda force transmitting means positioning structure. The force transmittingmeans positioning structure includes an opposed wall section spaced fromthe diaphragm section and arranged to face the diaphragm section, andpositions and arranges the force transmitting means so as to bring theforce transmitting means into direct contact with the central portion ofthe diaphragm section. Then, the force transmitting means is constitutedby a sphere having rigidity. In the present invention, a through holepassing through the opposed wall section in a direction toward thediaphragm section is formed in the opposed wall section of the forcetransmitting means positioning structure at a position facing thecentral portion of the diaphragm section. This through hole is so shapedthat a part of the sphere faces an outside of the opposed wall sectionand receives a part of the remainder of the sphere so that the spherecan move only in a direction orthogonal to the diaphragm section and canrotate on the central portion of the diaphragm section.

In a more specific configuration, a semiconductor force sensor of thepresent invention includes a semiconductor force sensor elementincluding a diaphragm section having a converting section for convertinga change in a force into a change in an electric signal bypiezoresistive effect, a sphere having rigidity for applying the forceto be measured to the diaphragm section of the semiconductor forcesensor element, a case main body having one open surface, a lid member,and a through hole formed in the lid member. The case main body havingone open surface includes an opening in the one surface, and includes asensor element supporting section for supporting the semiconductor forcesensor element at a position facing the opening so that deformation ofthe diaphragm section is allowed. The lid member includes an opposedwall section facing the diaphragm section of the semiconductor forcesensor element supported by the sensor element supporting section andfixed to the case main body so as to close the opening. The through holeis formed in the opposed wall section and receives the sphere. Then, thethrough hole is so shaped that a part of the sphere faces the outside ofan opposed wall section and receives a part of the remainder of thesphere so that the sphere can move only in a direction orthogonal to thediaphragm section and can rotate on the central portion of the diaphragmsection, with the sphere being in direct contact with the centralportion of the diaphragm section.

When the through hole in the opposed wall section is formed as in thepresent invention and a force in the direction orthogonal to thediaphragm section is applied to the sphere, the diagram section warpsdue to the force applied to the sphere. On contrast therewith, when aforce in a direction other than the direction orthogonal to thediaphragm section is applied to the sphere, the sphere rotates on thecentral portion of the diaphragm section due to a component force.Application of an undue force to the diaphragm section thus can beprevented. For this reason, breakage of the diaphragm section can beprevented. Further, only the component of the force applied to thedirection orthogonal to the diaphragm section can be accuratelymeasured.

The diaphragm section can be formed to have a front surface with theconverting section formed thereon and a back surface located opposite tothe front surface. Further, the semiconductor force sensor element canbe formed to have a cylindrical base section integrally formed with theperiphery of the back surface of the diaphragm section. In this case, itis preferable that the sphere is so arranged that a force is applied tothe surface of the diaphragm section. With this arrangement, measurementsensitivity can be enhanced. Incidentally, the force may be applied tothe back surface of the diaphragm section by bringing the sphere intocontact with the back surface of the diaphragm section.

The through hole may be circular or rectangular. If the through hole isformed to be circular, it can be formed into various shapes. The throughhole, for example, can be constituted by a first through hole portionlocated on a side of the diaphragm section and at a positioncorresponding to the lower half of the sphere, a second through holeportion located on a side of the outside, and a third through holeportion located between the first through hole portion and the secondthrough hole portion. In this case, it can be so configured that thefirst through hole portion has a constant diameter size slightly largerthan the diameter of the sphere, the second through hole portion has aconstant diameter size allowing the part of the sphere to be exposed tothe outside from the second through hole portion, and the third throughhole portion is so shaped that a diameter size thereof decreases moretoward the second through hole portion from the first through holeportion along the outer surface of the sphere. If the through hole isformed as described above, the sphere rotates along the third throughhole portion, so that rattling of the sphere within the through hole canbe prevented.

Alternatively, the through hole can be constituted by a first throughhole portion located on the side of the diaphragm section and secondthrough hole portion located on the side of the outside. In this case,the first through hole portion can be configured to have a constantdiameter size slightly larger than the diameter of the sphere. Further,the second through hole portion can be configured to be so shaped that adiameter size thereof gradually decreases toward the outside so as toallow the part of the sphere to be exposed to the outside from thesecond through hole portion. If the through hole is formed as describedabove, the through hole can be easily formed by simple machining.

The semiconductor force sensor element can be arranged by joining thebase section to the sensor element supporting section of the case mainbody. In this case, it is preferable that a gel-like protective agenthaving electrically insulating property is filled in the case main bodyso as to cover the diaphragm section. With this arrangement, it becomeseasy for the sphere to rotate on the central portion of the diaphragmsection due to the lubricating property of the gel-like protectiveagent. Incidentally, in order to improve the warp of the diaphragmsection caused by the sphere, it is preferable that penetration of thegel-like protective agent is so defined that the sphere pushes away thegel-like protective agent on the diaphragm section to cause the sphereto substantially come in direct contact with the central portion of thediaphragm section.

The case main body can include a bottom wall section constituting thesensor element supporting section, a peripheral wall section with oneend thereof integrally formed with the peripheral edge portion of thebottom wall section and the other end thereof formed to surround theopening, and a plurality of fitting protrusions provided on the otherend of the peripheral wall section, and can be integrally formed of anelectrically insulating resin material. Further, the lid member caninclude a plurality of through holes for being fitted, through which aplurality of fitting protrusions of the case main body pass, and can beintegrally formed of an electrically insulating resin material. Withthis arrangement, the lid member can be easily fixed to the case mainbody just through thermal deformation of leading edge portions of theplurality of fitting protrusions protruding from the lid member with theplurality of fitting protrusions of the case main body fitted into theplurality of through holes for being fitted in the lid member.

In such a case, it is preferable that a plurality of recess portions orstepped portions for receiving the fitting protrusions thermallydeformed are formed around the plurality of through holes for beingfitted in the lid member so as not to cause thermally deformed raisedportions to protrude outwardly from the lid member.

A pair of recess portions being open outwardly and toward the other endof the peripheral wall section can be formed at the pair of opposedlocations facing each other in the outer wall portion of the peripheralwall section. A pair of positioning protrusions extending from theopposed wall section toward the case main body and being fitted into thepair of recess portions described before can be integrally formed withthe lid member. With this arrangement, just by fitting the pair ofpositioning protrusions of the lid member into the pair of recessportions in the case main body, positioning of the lid member relativeto the case main body can be easily performed.

The case main body and the lid member can be formed of variousmaterials. The case main body and the lid member can be respectivelyformed of ceramics, for example. With this arrangement, the operatingtemperature range of the case main body and the lid member can beexpanded. Alternatively, the case main body can be formed of theceramics, and the lid member can be formed of a metal. With thisarrangement, the operating temperature range of the case main body canbe expanded. If the lid member is formed of the ceramics or the metal,the through hole can be easily formed in the lid member just by applyingsimple machining such as press punching.

Preferably, a communicating passage for communicating a space borderedby the base section and the diaphragm section with the outside of thecase main body is formed in the case main body. If such a communicatingpassage is formed, the space bordered by the base section and thediaphragm section is placed at atmospheric pressure, so that the warp ofthe diaphragm section becomes easier.

The semiconductor force sensor according to the present invention can beapplied to a surface-mount type semiconductor force sensor. If it isapplied to the surface-mount type semiconductor force sensor, thesurface-mounting area of the semiconductor force sensor can be reduced.In addition, there is an advantage that no terminals are bent due to anexternal force, or the like.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic sectional view of a semiconductor force sensoraccording to a first embodiment of the present invention;

FIGS. 2(A) to 2(D) are a cutaway top view, a back view, a cutaway frontview, and a cutaway right side view of a semiconductor force sensoraccording to a second embodiment of the present invention;

FIG. 3 is a sectional view showing the vicinity of the through hole ofthe semiconductor force sensor shown in FIG. 2;

FIGS. 4(A) and 4(B) are a back view and a sectional view of asemiconductor force sensor according to a third embodiment of thepresent invention;

FIG. 5 is a sectional view showing the vicinity of the through hole ofthe semiconductor force sensor shown in FIG. 4; and

FIGS. 6(A) and (B) are sectional views showing the vicinity of thethrough holes of semiconductor force sensors according to otherembodiments of the present invention.

BEST MODE FOR CARRYING OUT THE INVENTION

Embodiments of the present invention will be described in detail withreference to the accompanying drawings. FIG. 1 is a schematic sectionalview of a semiconductor force sensor according to a first embodiment ofthe present invention. Referring to FIG. 1, a semiconductor force sensorelement 1 is formed using a Silicon semiconductor substrate with an areaof 2.3 mm square and a thickness of 300 μm, for detecting a force. Atthe center of the semiconductor substrate is formed a diaphragm section3, and its periphery is supported by a base section 5 integral with thediaphragm section 3. The diaphragm section 3 has a converting section 3a on its front surface portion 3 b. The converting section 3 a comprisesfour diffusion resistances constituting a bridge circuit formed in thesemiconductor substrate. The diffusion resistances convert a forceapplied to the converting section 3 a into an electric signal bypiezoresistive effect. The diaphragm section 3 is a silicon diaphragmconstituted by the bottom of a recess section formed by etching from theback surface of the semiconductor substrate. The base section 5 isidentified as a portion that has remained after etching for forming thediaphragm section 3 in the semiconductor substrate. The base section 5supports the periphery of the diaphragm section 3, and a plurality ofconnecting electrodes connected to the resistance bridge circuit areformed on its surface. The resistances of the resistance bridge circuitare connected to an external circuit through the connecting electrodes,not shown. After the resistances are formed, the surface of thesemiconductor force sensor element 1 is covered with an electricalinsulation film for protection.

Force transmitting means 9 is intended to transmit a force to bemeasured to the diaphragm section 3 of the semiconductor force sensorelement 1. The force transmitting means 9 is formed of a metal sphere.In this embodiment, it is necessary to arrange the force transmittingmeans 9 so that the center of gravity of the force transmitting means 9formed of the sphere is located above a center 3 d of the diaphragmsection 3 of the semiconductor force sensor element 1 (or so that thecenter of the force transmitting means 9 formed of the sphere is locatedon a virtual orthogonal line orthogonal to the front surface of thediaphragm section 3). Referring to FIG. 1, for explanation, illustrationis made so that there is a comparatively large space between the innerwall surface of a through hole 16 a formed in a guide member 16 forguiding the force transmitting means 9 and the outer surface of theforce transmitting means 9 formed of the sphere. In actual use, however,the guide member 16 constituting the structure of mounting the forcetransmitting means is so structured that when a force is applied to theforce transmitting means 9 formed of the sphere at a predetermined anglewith the virtual orthogonal line described before, the forcetransmitting means 9 is rotated by a component force directed in adirection not along the virtual orthogonal line described before, andthat the force transmitting means 9 formed of the sphere moves along thevirtual orthogonal line by a component force directed in a directionalong the virtual orthogonal line. Specifically, if the diameter of theforce transmitting means 9 formed of the sphere is 1 mm, the limit forthe amount of motion of the force transmitting means 9 formed of thesphere is approximately 100 μm under application of the force of 5 kgf.If the amount of motion is restricted to such a level, the diaphragmsection is not destroyed, and the relationship between force conversionand a change in output becomes more linear (rectilinear). Normally, theamount of motion becomes approximately 15 μm under application of theforce of 500 gf.

When no force is applied to the force transmitting means 9,theoretically, the force transmitting means 9 is in point contact withthe diaphragm section 3. Accordingly, if the force transmitting means 9is positioned with good accuracy, a load acts only on the centralportion 3 d of the diaphragm section 3 of the semiconductor force sensorelement 1. When the force is applied to the force transmitting means 9,the diaphragm section 3 deforms. However, the force transmitting means 9does not substantially deform. Accordingly, the rigidity of the forcetransmitting means 9 is selected so that an output characteristicbecomes as close to a straight line as possible.

In this embodiment, by appropriately determining a protruding length L(approximately 100 μm) of the spherical force transmitting means 9 thatprotrudes from the through hole 16 a of the guide member 16, the amountof motion of the force transmitting means 9 to the diaphragm section 3can be restricted.

A portion 17 of the through hole 16 a formed in the guide member 16 onthe side of the diaphragm section 3 has a cylindrical shape, and aportion 18 outside it has a shape of a truncated cone. Incidentally,with no force practically applied to the force transmitting means 9, theinner wall surface of the portion 18 is in contact with the outersurface of the force transmitting means 9. The portion 18 having theshape of the truncated cone functions to prevent the spherical forcetransmitting means 9 from coming out of the through hole 16 a.

It can be seen that the contact surface of the force transmitting means9 is preferably a quadratic curved surface, as in the spherical forcetransmitting means shown in FIG. 1.

In the embodiment in FIG. 1, a load from the direction of a side of thefront surface portion 3 b is applied to the diaphragm section 3 throughthe transmitting means, so that the diaphragm section 3 deforms. Anoutput voltage that changes linearly with respect to a change in theload can be thereby obtained.

FIGS. 2(A) to 2(D) are a cutaway top view, a back view, a cutaway frontview, and a cutaway right side view of a semiconductor force sensor in asecond embodiment of the present invention applied to a surface-mounttype semiconductor force sensor. As shown in the respective drawings,the semiconductor force sensor in this embodiment includes asemiconductor force sensor element 31, a sphere 33 constituting theforce transmitting means, and a case 35. The semiconductor force sensorelement 31 is formed using a Silicon semiconductor substrate with anarea of 2.3 mm square and a thickness of 300 μm, and includes adiaphragm section 37 and an annular base section 39 integrally formedwith the periphery of the diaphragm section 37. On the front surface ofthe diaphragm section 37 is formed a converting section for converting achange in a force into a change in an electric signal by piezoresistiveeffect. The base section 39 is joined to a sensor element supportingsection 48 for the case 35, so that the semiconductor force sensorelement 31 is received within the case 35.

The sphere 33 is formed of a metal ball having rigidity and constitutesthe force transmitting means for applying a force to be measured to thediaphragm section 37 of the semiconductor force sensor element 31. Thesphere 33 is in direct contact with the central portion of the diaphragmsection 37 of the semiconductor force sensor element 31 so that theforce can be directly applied to the diaphragm section 37.

The case 35 includes a case main body 41 and a lid member 43 fixed tothe case main body 41. The case main body 41 is formed of a resin andhas a shape of a box having one open surface with an opening 45 therein.This case main body 41 includes a nearly rectangular bottom wall section47 and a peripheral wall section 49 integrally formed with theperipheral edge portion of the bottom wall section 47. To the bottomwall section 47, six terminals 51 are so fixed that the respective threeof the terminals protrude from both sides of the semiconductor forcesensor element 31 in a longitudinal direction thereof. Most of theterminals 51 are buried inside the bottom wall section 47 and have creamsoldering surfaces 51 a exposed to the outside so that the semiconductorforce sensor can be surface mounted on a circuit substrate. In thisembodiment, the case main body 41 was formed by injection molding withthe six terminals 51 used as inserts. Incidentally, six holes 47 a thatpass through the bottom wall section 47 are the holes from which pinsfor supporting the six terminals 51 within a mold have come off when thecase main body 41 is injection molded. In the bottom wall section 47, acommunicating passage 47 b for communicating a space bordered by thebase section 39 and the diaphragm section 37 of the semiconductor forcesensor element 31 with the outside of the case main body 41 is so formedas to pass through the bottom wall section 47. The bottom wall section47 includes in its central portion the sensor element supporting section48 to which the semiconductor force sensor element 31 is joined. Withthe base section 39 joined to the sensor element supporting section 48as described above, a gel-like protective agent formed of silicone withelectrically insulating property is filled in the case main body 41 soas to cover the diaphragm section 37. The penetration of the gel-likeprotective agent 50 is so defined that the sphere 33 pushes away thegel-like protective agent 50 on the diaphragm section 37 tosubstantially come in direct contact with the central portion of thediaphragm section 37. In this embodiment, this penetration is defined tobe approximately 65, and its elastic modulus is defined to beapproximately 1×10⁻⁵ N/m². At a pair of opposed outer wall positions,facing each other, of the peripheral wall section 49, a pair of recesssections 53, which are open outwardly and toward the other end of theperipheral wall section 49, is formed. A pair of positioning protrudingsections 57 of the lid member 43, which will be described later, areengaged with the pair of the recess sections 53.

The lid member 43 includes an opposed wall section 55 shaped like arectangular plate, arranged to face the diaphragm section 37 and thepair of positioning protruding sections 57 that protrude from theopposed wall section 55, all of which are integrally formed of asynthetic resin. The pair of positioning protruding sections 57 extendfrom the center of the longer sides of the opposed wall sections 55 tothe case main body 41 to be engaged with the recess sections 53 of thecase main body 41. The opposed wall section 55 has four recess portionsor stepped portions 59 formed by reducing the thickness of the opposedwall section 55 at its four corners. Substantially at the centers of thefour stepped portions 59 are formed four fitted through holes 61,respectively. The lid member 43 is fixed to the case main body 41 bythermal adhesion sections 60. These thermal adhesion sections 60 areformed by thermally deforming the leading edge portions of four fittingprotrusions that protrude from the lid member 43 with the four fittingprotrusions formed in the case main body 41 fitted into the four fittedthrough holes 61. At a position facing the central portion of thediaphragm section 37 of the opposed wall section 55, a through hole 63for receiving the sphere 33 is formed. As shown in FIG. 3 in detail, thethrough hole 63 is constituted by a first through hole portion 65 on theside of the diaphragm section 37, a second through hole portion 67located outside, and a third through hole portion 69 between the firstthrough hole portion 65 and the second through hole portion 67. Thefirst through hole portion 65 is formed at a position corresponding tothe lower half of the sphere 33 and has a constant diameter slightlylarger than the diameter of the sphere 33. The second through holeportion 67 has a constant diameter size that allows part of the sphere33 to be exposed to the outside from the second through hole portion 67.The third thorough hole portion 69 is so shaped that the diameter sizethereof decreases more toward the second through hole portion 67 fromthe first through hole portion 65 along the outer surface of the sphere.The sphere 33 is positioned within the case 35 so that by being receivedin the through hole 63, part of the sphere 33 faces the outside of theopposed wall section 55 through the through hole and the sphere 33 canmove only in a direction orthogonal to the diaphragm section 37 and canrotate on the central portion of the diaphragm section 37, with thesphere 33 in direct contact with the central portion of the diaphragmsection 37. As with this embodiment, the through hole provided with thethrough hole portion (third through hole portion 69) shaped along theouter surface of the sphere is suitable in the case where the lid member43 is formed of a flexible synthetic resin. If the through hole 63 isformed to have a shape as in this embodiment, the sphere 33 rotatesalong the third through hole portion 69. Thus, the sphere 33 can beprevented from rattling within the through hole 63.

In the semiconductor force sensor in this embodiment, when a force in adirection orthogonal to the diaphragm section 37 (indicated by an arrowA) is applied to the sphere 33, the diagram section 37 warps due to theforce applied to the sphere 33. On contrast therewith, when a force in adirection other than the direction orthogonal to the diaphragm section37, (indicated by an arrow B), is applied to the sphere 33, the sphere33 rotates (in the direction indicated by an arrow C) on the centralportion of the diaphragm section 37 due to a component force.Application of an undue force to the diaphragm section 37 thus can beprevented. For this reason, breakage of the diaphragm section 37 can beprevented. Further, only the component of the force applied to thedirection orthogonal to the diaphragm section 37 can be accuratelymeasured.

FIGS. 4(A) and 4(B) are a back view and a sectional view of asemiconductor force sensor according to a third embodiment of thepresent invention applied to a surface mounted type semiconductor forcesensor. This embodiment includes the same structure as the semiconductorforce sensor shown in FIG. 2, except for the structure of the case.Accordingly, in this drawing, reference numerals added by 100 areassigned to the members that are the same as those of the semiconductorforce sensor in FIG. 2, and their descriptions will be thereby omitted.

As shown in these figures, a case 135 includes a case main body 141 anda lid member 143 fixed to the case main body 141. The case main body 141is formed of ceramics and has a shape of a box having an opening 145 inone surface thereof. This case main body 141 includes a bottom wallsection 147 and a peripheral wall section 149 integrally formed with theperipheral edge portion of the bottom wall section 147. On the backsurface of the bottom wall section 147, eight terminals 151 are formedof a metal film so that the four of the terminals are arranged each ateither edge of a semiconductor force sensor element 131 in alongitudinal direction thereof. The eight terminals 151 are electricallyconnected to the converting section on the front surface of thediaphragm section via conductive sections formed in grooves 141 a thatextend vertically at both opposed sides of the case main body 141 in thelongitudinal direction thereof. In the bottom wall section 147, acommunicating passage 147 b for communicating a space bordered by a basesection 139 and a diaphragm section 137 of a semiconductor force sensorelement 131 with the outside of the case main body 41 is so formed as topass through the bottom wall section 147. The bottom wall section 147includes in its central portion sensor element supporting section 148 towhich the semiconductor force sensor element 131 is joined. With thebase section 139 joined to the sensor element supporting sections 148 asdescribed above, a gel-like protective agent 150 formed of silicone withelectrically insulating property is filled in the case main body 141 soas to cover the diaphragm section 137.

The lid member 143 constitutes an opposed wall section shaped like arectangular plate, arranged to face the diaphragm section 137, and isformed by lamination of a second lid plate member 142 on a first lidmember 140. The first lid plate member 140 and the second lid platemember 142 are both formed of the ceramics or a metal and have arectangular shape. As shown in FIG. 5 in detail, a first through holeportion 165 formed passing through the central portion of the first lidplate member 140 and a second through hole portion 167 formed passingthrough the central portion of the second lid plate member 142 form athrough hole 163 for receiving a sphere 133. The first through holeportion 165 has a constant diameter size slightly larger the diameter ofthe sphere 133. The second through hole portion 167 is so shaped thatthe diameter size thereof gradually decreases toward the outside so asto allow part of the sphere 133 to be exposed to the outside from thesecond through hole portion 167. The through hole in this embodiment issuitable for the case where the lid members are formed of the ceramicsor the metal with high hardness. If the first through hole portion 165is formed in the first lid plate member 140 and the second through holeportion 167 is formed in the second lid plate member 142 as describedabove, the first through hole portion 165 and the second through holeportion 167 can be easily formed with accurate dimensions, even if thelid member 143 is formed using the ceramics or the metal with highhardness. Further, if at least one of the case main body 141 and the lidmember 143 is formed of the ceramics, the operating temperature range ofthe case main body or the lid member can be expanded.

As shown in FIGS. 6(A) and 6(B), various shapes can be adopted as theshape of the through hole. A through hole 263 shown in FIG. 6(A) isconstituted by a first through hole portion 265 located on the side ofthe diaphragm section, and a second through hole portion 267 locatedoutside. The first through hole portion 265 is formed at a positioncorresponding to the lower half of a sphere 233 and has a constantdiameter size slightly larger than the diameter of the sphere 233. Thesecond through hole portion 267 is so shaped that the diameter sizethereof decreases more toward the outside along the outer surface of thesphere 233 so as to allow part of the sphere 233 to be exposed to theoutside. The through hole in this embodiment is suitable when the lidmembers are formed of the flexible synthetic resin as described before.In this embodiment, the portion (second through hole portion 267) of thethrough hole 263 of which the diameter size decreases more toward theoutside along the outer surface of the sphere 233 is formed in a widerrange than in the through hole 63 shown in FIG. 2. Thus, rattling of thesphere 233 can be prevented more than in the example shown in FIG. 2.

A through hole 363 shown in FIG. 6(B) is constituted by a first throughhole portion 365 located on the side of the diaphragm section, a secondthrough hole portion 367 located outside, and a third through holeportion 369 located between the first through hole portion 365 and thesecond through hole portion 367. The first through hole portion 365 hasa constant diameter size slightly larger than the diameter of the sphere333. The second through hole portion 367 has a constant diameter sizethat allows part of the sphere 333 to be exposed to the outside from thesecond through hole portion 367. The third through hole portion 369 hasan annular shape orthogonal to the first through hole portion 365 andthe second through hole portion 367. The through hole in this embodimentis suitable for the case where the lid member is formed of the ceramicsor the metal with high hardness. In this embodiment as well, as in thethrough hole 163 shown in FIG. 5, the first through hole portion 365 andthe second through hole portion 367 can be easily formed with accuratedimensions even if the lid members are formed using the ceramics or themetal with high hardness.

INDUSTRIAL APPLICABILITY

According to the present invention, even if a force in a direction otherthan a direction orthogonal to the diaphragm section is applied to thesphere, breakage of the diaphragm section can be prevented since noundue force is applied to the diaphragm section. Further, only the forceapplied in the direction orthogonal to the diaphragm section can bemeasured accurately.

1. A semiconductor force sensor comprising: a semiconductor force sensorelement including a diaphragm section having a converting section forconverting a change in a force into a change in an electric signal bypiezoresistive effect; force transmitting means for applying the forceto be measured to said diaphragm section of said semiconductor forcesensor element; and a force transmitting means positioning structurehaving an opposed wall section spaced from said diaphragm section andarranged to face said diaphragm section, for positioning and arrangingsaid force transmitting means so that said force transmitting means isbrought into direct contact with a central portion of said diaphragmsection, said force transmitting means being constituted by a spherehaving rigidity; wherein a through hole passing through said opposedwall section in a direction toward said diaphragm section is formed insaid opposed wall section of said force transmitting means positioningstructure at a position facing said central portion of said diaphragmsection; and said through hole is so shaped that a part of said spherefaces an outside of said opposed wall section therethrough and receivesa part of a remainder of said sphere so that said sphere can move onlyin a direction orthogonal to said diaphragm section and can rotate onsaid central portion of said diaphragm section.
 2. The semiconductorforce sensor according to claim 1, wherein said diaphragm section has afront surface with said converting section formed thereon and a backsurface located opposite to said front surface; said semiconductor forcesensor element has a cylindrical base section formed integrally with aperiphery of said back surface of said diaphragm section; and saidsphere is arranged to apply said force to said front surface of saiddiaphragm section.
 3. The semiconductor force sensor according to claim1, wherein said through hole comprises: a first through hole portionlocated on a side of the diaphragm section and at a positioncorresponding to a lower half of said sphere: a second through holeportion located on a side of said outside; and a third through holeportion located between said first through hole portion and said secondthrough hole portion; and said first through hole portion has a constantdiameter size slightly larger than a diameter of said sphere, saidsecond through hole portion has a constant diameter size allowing saidpart of said sphere to be exposed to said outside from said secondthrough hole portion, and said third through hole portion is so shapedthat a diameter size thereof decreases more toward said second throughhole portion from said first through hole portion along an outer surfaceof said sphere.
 4. The semiconductor force sensor according to claim 1,wherein said through hole comprises a first through hole portion locatedon a side of said diaphragm section and a second through hole portionlocated on a side of said outside; and said first through hole portionhas a constant diameter size slightly larger than a diameter of saidsphere, and said second through hole portion is so shaped that adiameter size thereof gradually decreases toward said outside so as toallow said part of said sphere to be exposed to said outside from saidsecond through hole portion.
 5. The semiconductor force sensor accordingto claim 2, wherein a side of said diaphragm section on which saidsphere is located is covered with a gel-like protective agent havingelectrically insulating property; and penetration of said gel-likeprotective agent is so defined that said sphere pushes away saidgel-like protective agent on said diaphragm section to substantiallycome in direct contact with said central portion of said diaphragmsection.
 6. A semiconductor force sensor comprising: a semiconductorforce sensor element including a diaphragm section having a convertingsection for converting a change in a force into a change in an electricsignal by piezoresistive effect; a sphere having rigidity for applyingthe force to be measured to said diaphragm section of said semiconductorforce sensor element; a case main body having one open surface,including an opening in said one open surface and a sensor elementsupporting section for supporting said semiconductor force sensorelement at a position facing said opening so that deformation of saiddiaphragm section is allowed; a lid member including an opposed wallsection facing said diaphragm section of said semiconductor force sensorelement supported by said sensor element supporting section and fixed tosaid case main body so as to close said opening; and a through holeformed in said opposed wall section, for receiving said sphere; saidthrough hole being so shaped that a part of said sphere faces an outsideof said opposed wall section therethrough and receives a part of aremainder of said sphere so that said sphere can move only in adirection orthogonal to said diaphragm section and can rotate on acentral portion of said diaphragm section with said sphere being indirect contact with said central portion of said diaphragm section. 7.The semiconductor force sensor according to claim 6, wherein saiddiaphragm section has a front surface with said converting sectionformed thereon and a back surface located opposite to said frontsurface; said semiconductor force sensor element has a cylindrical basesection integrally formed with a periphery of said back surface of saiddiaphragm section; and said sphere is arranged to apply said force tosaid front surface of said diaphragm section.
 8. The semiconductor forcesensor according to claim 6, wherein said through hole comprises: afirst through hole portion located on a side of the diaphragm sectionand at a position corresponding to a lower half of said sphere; a secondthrough hole portion located on a side of said outside; and a thirdthrough hole portion located between said first through hole portion andsaid second through hole portion; and said first through hole portionhas a constant diameter size slightly larger than a diameter of saidsphere, said second through hole portion has a constant diameter sizeallowing said part of said sphere to be exposed to said outside fromsaid second through hole portion, and said third through hole portion isso shaped that a diameter size thereof decreases more toward said secondthrough hole portion from said first through hole portion along an outersurface of said sphere.
 9. The semiconductor force sensor according toclaim 6, wherein said through hole comprises a first through holeportion located on a side of said diaphragm section and a second throughhole portion located on a side of said outside; and said first throughhole portion has a constant diameter size slightly larger than adiameter of said sphere, and said second through hole portion is soshaped that a diameter size thereof gradually decreases toward saidoutside so as to allow said part of said sphere to be exposed to saidoutside from said second through hole portion.
 10. The semiconductorforce sensor according to claim 7, wherein, with said base section beingjoined to said sensor element supporting section of said case main body,a gel-like protective agent having electrically insulating property isfilled in said case main body so as to cover said diaphragm section; andpenetration of said gel-like protective agent is so defined that saidsphere pushes away said gel-like protective agent on said diaphragmsection to substantially come in direct contact with said centralportion of said diaphragm section.
 11. The semiconductor force sensoraccording to claim 6, wherein said case main body comprises a bottomwall section constituting said sensor element supporting section, aperipheral wall section having one end thereof integrally formed with aperipheral edge portion of said bottom wall section and the other endthereof formed so as to surround said opening, and a plurality offitting protrusions provided on the other end of said peripheral wallsection, and is integrally formed of an electrically insulating resinmaterial; said lid member includes a plurality of fitted through holesand is integrally formed of an electrically insulating resin material,said plurality of fitting protrusions of said case main body passingthrough said plurality of the fitted through holes; and said lid memberis fixed to said case main body by thermal deformation of leading edgeportions of said plurality of the fitting protrusions protruding fromsaid lid member, with said plurality of the fitting protrusions of saidcase main body being fitted into said plurality of the fitted throughholes in said lid member.
 12. The semiconductor force sensor accordingto claim 11, wherein a recess portion or stepped portion for receivingsaid fitting protrusion thermally deformed is formed around said fittedthrough hole in said lid member.
 13. The semiconductor force sensoraccording to claim 11, wherein a pair of recess portions are formed at apair of opposed locations facing each other in an outer wall portion ofsaid peripheral wall section, said pair of the recess portions beingopen outwardly and toward the other end of said peripheral wall section;and a pair of positioning protrusions are integrally formed with saidlid member, said pair of the positioning protrusions extending from saidopposed wall section toward said case main body and being fitted intosaid pair of the recess potions.
 14. The semiconductor force sensoraccording to claim 6, wherein said case main body and said lid memberare respectively formed of ceramics.
 15. The semiconductor force sensoraccording to claim 6, wherein said case main body is formed of ceramicsand said lid member is formed of a metal.
 16. The semiconductor forcesensor according to claim 10, wherein said case main body is providedwith a communicating passage for communicating a space bordered by saidbase section and said diaphragm section with an outside of said casemain body.
 17. A surface-mount type semiconductor force sensorcomprising: a semiconductor force sensor element including a diaphragmsection having a converting section for converting a change in a forceinto a change in an electric signal by piezoresistive effect; a spherehaving rigidity for applying the force to be measured to said diaphragmsection of said semiconductor force sensor element; a case main bodyhaving one open surface and formed of a synthetic resin, said case mainbody including an opening in said one open surf ace and a sensor elementsupporting section for supporting said semiconductor force sensorelement at a position facing said opening so that deformation of saiddiaphragm section is allowed; a lid member including an opposed wallsection facing said diaphragm section of said semiconductor force sensorelement supported by said sensor element supporting section and fixed tosaid case main body so as to close said opening; a through hole formedin said opposed wall section, for receiving said sphere; and a pluralityof terminals fixed to said case main body by insert molding; saidthrough hole being so shaped that a part of said sphere faces an outsideof said opposed wall section therethrough and receives a part of aremainder of said sphere so that said sphere can move only in adirection orthogonal to said diaphragm section and can rotate on acentral portion of said diaphragm section with said sphere being indirect contact with said central portion of said diaphragm section; andsaid plurality of the terminals protruding from said case main body toenable surface mounting.